Recently, the convergence of photonics and electronics, known as Silicon Photonics, has marked a significant advancement in both performance and the reduction of power consumption.
Nanopositioning and Motion Control Solutions for the Semiconductor Industry
Article from | PI
Moore's Law - How we got from Micrometers to Nanometers
Video: A multi-axis wafer inspection stage combining different PI nanopositioning technologies: air bearings, linear motors, piezo-nanopositioning motors for dynamic leveling and angular corrections, operated by high performance ACS industrial motion controllers.
Precision Motion, Alignment and Nanopositioning Solutions for Highly Sensitive Manufacturing Processes
A vacuum compatible, 6-degree-of-freedom, closed-loop piezo nanopositioning and alignment stage for semiconductor metrology. PI designs multi-axis nanopositioning systems with resolution down to 1/10 nanometer and better.
Involved in Many Process Steps
The Customer in Focus: Much More than Technology, Components, and Systems
In all of these applications, the ability to precisely control the motion and position of objects with nanometer and even sub-nanometer resolution and high dynamics, or to hold a position precisely over the long term, without power requirements, plays a decisive role.
PI offers decades of know-how and a wide range of technologies – including piezo transducers, developed and manufactured in our PI Ceramic subsidiary, sensors, piezo actuators and motors and air bearing motion systems with 3-phase linear motors drives to controllers, software, and firmware – as well as components and systems. Together with our subsidiary ACS Motion Control, a market and technology leader in industrial high performance, EtherCat-based controller technology, we also enable the control of highly complex multi-axis systems for the next generation of demanding applications in semiconductor manufacturing all the way up to EUV-L.
Advanced Design, Copy Exactly, and Global Services
Advanced design alone is not enough. It is our long experience as a supplier to leading system integrators in semiconductor manufacturing that enables us to understand and meet the high demands of this industry. With customer-specific service level agreements (SLA) and a global service team, we can react promptly to disruptions occurring on short notice. To this end, we have set up service hubs with highly qualified staff near the world's most important semiconductor production locations, where we keep spare parts for all critical components and assemblies. Based on extensive long-term tests of our components under a wide variety of climatic conditions and a Copy Exactly strategy, we offer our customers a high level of security against failure from the outset, i.e. high uptime. Also, PI has created clean rooms that even meet the exceptional cleanliness requirements that are required in the manufacture of components for EUV lithography.
On The Way to The Next Big Thing
The success factors of the semiconductor industry, in particular continuous miniaturization of structures, will ensure innovations for a long time to come. And PI has exciting answers ready for the increasing demands on precision in motion control and high-performance positioning. And the semiconductor industry is changing at a faster pace than at any time since the invention of the integrated circuit. While Moore’s Law continues its relentless advance to drive ever-smaller feature sizes and higher performance and efficiencies, it is no longer just about smaller transistors on larger wafers. Now micro-optical components are being fabricated alongside microelectronics, and entirely new computing and communications paradigms are emerging which leverage the mysteries of the quantum world. As the applications change, so do chips, and the revolution proceeds. PI is right there, partnering with the leaders of change.
The content & opinions in this article are the author’s and do not necessarily represent the views of RoboticsTomorrow
PI USA (Physik Instrumente)
PI is a privately held company that designs and manufactures world-class precision motion and automation systems including air bearings, hexapods and piezo drives at locations in North America, Europe, and Asia. The company was founded 5 decades ago and today employs more than 1700 people worldwide. PI's customers are leaders in high-tech industries and research institutes in fields such as photonics, life-sciences, semiconductors and aerospace.
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